Impact of boundary conditions and geometric tolerances dynamics on MEMS double touch mode capacitance pressure sensor applying M-shaped silicon design

Keyword: Matlab

Publisher: Nature.com

Published: Jun 22, 2026

Micro-Electro-Mechanical Systems (MEMS) are extensively utilized in many different applications because of its compact design, low power consumption and greater sensitivity. Compared to piezoresistiv… [+1542 chars]

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